ABSTRACT: The Boonton Model 7200 Capacitance Meter is a precision, high-speed instrument used to measure the capacitance of semiconductor devices and passive components. One application for the Model 7200 is the measurement of Deep Level Transient Spectroscopy, or DLTS. This application note provides guidelines for using the Model 7200 in a DLTS system; it analyzes several ways of generating pulse bias and presents examples of the measurement capabilities of the Model 7200.
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